LIANG Zhimin, ZHAI Jianguang, ZHANG Feng. Diamond-Like Carbon Deposited by RF Magnetron Sputtering[J]. Journal of Shanghai University of Engineering Science, 2013, 27(3): 244-247. doi: 10.3969/j.issn.1009-444X.2013.03.012
Citation:
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LIANG Zhimin, ZHAI Jianguang, ZHANG Feng. Diamond-Like Carbon Deposited by RF Magnetron Sputtering[J]. Journal of Shanghai University of Engineering Science, 2013, 27(3): 244-247. doi: 10.3969/j.issn.1009-444X.2013.03.012
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LIANG Zhimin, ZHAI Jianguang, ZHANG Feng. Diamond-Like Carbon Deposited by RF Magnetron Sputtering[J]. Journal of Shanghai University of Engineering Science, 2013, 27(3): 244-247. doi: 10.3969/j.issn.1009-444X.2013.03.012
Citation:
|
LIANG Zhimin, ZHAI Jianguang, ZHANG Feng. Diamond-Like Carbon Deposited by RF Magnetron Sputtering[J]. Journal of Shanghai University of Engineering Science, 2013, 27(3): 244-247. doi: 10.3969/j.issn.1009-444X.2013.03.012
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Diamond-Like Carbon Deposited by RF Magnetron Sputtering