Dynamic modeling and analysis of flexure mechanism in two-dimensional micro motion stage

LIU Hao; LAI Leijie

doi:10.12299/jsues.22-0274

Volume 37 Issue 2

Jun. 2023

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Article Navigation > Journal of Shanghai University of Engineering Science > 2023 > 37(2): 179-183

LIU Hao, LAI Leijie. Dynamic modeling and analysis of flexure mechanism in two-dimensional micro motion stage[J]. Journal of Shanghai University of Engineering Science, 2023, 37(2): 179-183. doi: 10.12299/jsues.22-0274

Citation:

LIU Hao, LAI Leijie. Dynamic modeling and analysis of flexure mechanism in two-dimensional micro motion stage[J]. Journal of Shanghai University of Engineering Science, 2023, 37(2): 179-183. doi: 10.12299/jsues.22-0274

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Dynamic modeling and analysis of flexure mechanism in two-dimensional micro motion stage

doi: 10.12299/jsues.22-0274

LIU Hao,
LAI Leijie^,

School of Mechanical and Automotive Engineering, Shanghai University of Engineering Science, Shanghai 201620, China

Received Date: 2022-09-13
Publish Date: 2023-06-20

Abstract

Abstract

A two degree of freedom translational decoupling parallel micropositioning stage based on parallel flexure mechanism was proposed. A compound double parallel four-bar flexure mechanism module was adopted in the stage, and structural symmetry constraints were introduced to eliminate the coupling between shafts and parasitic displacement, and translations in X and Y directions were achieved. The stiffness matrix method was used to analyze the parallel flexure mechanism in theory. According to the observation method, the overall stiffness matrix of the micropositioning stage was established, and the differential equations of motion of the system were obtained, and the natural frequencies of each order of the system were deduced. The modal analysis of the micropositioning stage was carried out by using the finite element method, and the natural frequency and mode shape of the micropositioning stage were obtained. Through theoretical analysis, finite element calculation and experimental test, the consistency of the results shows the correctness of theoretical analysis and the effectiveness of stiffness matrix analysis.
- micropositioning,
- flexure mechanism,
- stiffness matrix,
- finite element

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References(10)

References

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